Cross tables
Repeat accuracy of 0.1 µm
For areas such as industrial metrology and microscopy, optical inspection tasks and laser processing, Physik Instrumente (PI) offers a new series of differently motorized cross tables: V-731 and L-731.
They operate at speeds of up to 200 mm/s, with a bidirectional repeatability of 0.1 µm and a smallest increment of 0.02 µm. The 310 mm × 310 mm × 80 mm XY stages are available with travels of 205 mm × 205 mm mm (8 inches), whereby customer-specific adaptations are also possible. They are controlled via PI controllers or - in multi-axis portal applications - via an industrial control system from ASC. The new cross tables are driven by linear drives (V-731) or stepper or DC motors (L-731). The three-phase linear motors dispense with mechanical components in the drive train and transmit the drive force directly to the motion platform without friction. This enables speeds of up to 200 mm/s. According to the manufacturer, the ironless motors are particularly suitable for positioning tasks with high precision requirements, as there are no undesirable interactions with the permanent magnets. The L-731 cross table operates at speeds of up to 80 mm/s. Either stepper or DC motor spindle drives can be used as the drive.
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