The D6F-PH digital flow sensor from Omron can measure slow air flows with above-average accuracy and repeatability. It is based on Omron's MEMS thermal flow sensor chip technology. It measures with higher accuracy and over a wider pressure range than the commonly used capacitive and piezoelectric differential pressure sensors. An integrated ASIC makes digital corrections, e.g. for linearity and temperature deviations. Used in bypass configurations where the small differential pressure generated by a nozzle or flow limiter correlates with the high flow rate in the main channel. Other features include a digital correction algorithm for an accuracy of 3 % R.D. (relative differential pressure) and an increased flow impedance to reduce the influence of the length and diameter of the bypass line. The sensor is supplied in three versions with different measuring ranges: 0 to 250 Pa, +/-50 PA and +/- 500 Pa. The power consumption is 6 mA, the supply voltage 3.3 VDC. The sensor measures 26 x 22 x 18 ^mm3.