The SiF2011 mass flow sensor is based on a patented monolithic MEMS sensor element from SiFlo Technologies. The sensor is suitable for both gases and liquids and can be used for direct measurement in the flow range from 0 to 2 slpm (standard liters per minute). Other flow ranges can be customized. The measuring principle is a thermal method consisting of a heating element and two differentially arranged thermocouples. The temperature gradient is a measure of the flow rate. In contrast to conventional technology, in which the heating element and measuring resistors come into direct contact with the medium to be measured, the sensor element is located entirely inside a monolithic semiconductor. The medium therefore only touches the resistant protective layer of the sensor, which is thus protected against contamination, condensation and abrasion. The sensor offers both an analog output (0 to 5 V) and a digital I2C interface, has a response time of <8 ms and operates in the temperature range from -25 to +85 °C.